Water cooled plate - Automatic helium detection line

[Feature]

1. Equipped with power lines inside and outside the chamber and an automatic docking mechanism, connected to the power line body on site of Party A. The workpiece is placed on the workpiece tray to achieve automatic entry and exit of the chamber and automatic sealing.
2. Equipped with the protective cover, the equipment will automatically stop all operations when any door panel is open, ensuring that there are no objects that interfere with the movement of the line body.